The actual progress of technology is in lithography. The lithography machines are produced by ASML and used by almost all major chip producers[1]. Currently ASML is building their new line of machines, namely with extreme ultraviolet lithography instead of what the line of current machines use.
What I do not know, if the machines are currently used for Intels 14nm or that the old machines are still used (or maybe both). What I do know, is that ASML and Intel are having problems with getting to 10nm. That is because they have to improve the current machines, you observe this from the delay in the Tick-Tock from Intel.
Which brings us to the Tick-Tock of Intel, this is the improvement of the chip structure itself. They do this because they have to wait for the smaller transistors.
At last, what I heard is that the ASML machine is getting more and more complicated. Especially because they are having troubles with the laws of nature.
[1] http://www.wsj.com/articles/SB100014241278873238093045784288...