The problem with more salary is more responsibility. More likely to be cut if you don't perform at the level commensurate with the salary.
Your options really come down to whether you want to truly remain a "programmer" in which you may have to make some concessions to compete with the other programmers in the market. Your responsibilities remain that of a programmer. Or you have to take on a manager/director/architect role which is less programming skill and more people management skill with a lot more responsibility.
Instead of being seen as a curmudgeon who could be replaced by four college grads, you're an external, automatically-trusted authority who commands a healthy day rate.
It's just a matter of optics. Though that life isn't for everyone.