In spirit of findings new paths, just an idea (and I'm not sure at all that this is a practical solution):

fail2ban---a tool commonly used in servers to automatically block remote attackers such as spammers---can be configured to automatically send an attack report to some e-mail address when it detects an attack.

A browser extension, such as PrivacyBadger, could do a similar thing when it detects a tracker. Let the report be sent to a law enforcement agency that is setup to deal with this kind of problem. If this agency collects enough data, then it can do some data mining to find, for example, the most violent trackers. If that works, maybe such a tool can be used to give law enforcement some actual power to punish these companies.