The Copper Vapor Laser
copper.org
copper.org
Sam's Laser FAQ has a lot on the topic https://www.repairfaq.org/sam/laserccb.htm
Riddle me this: When Intel produces a, say 14nm chip, they're using something like 190ishnm [SI] laser to strike the image, and they co-developed tech with IBM to take advantage of interference patterns to get down to a 14nm lithograph. 190nm into 14nm doesn't seem like an extreme jump, but 510nm laser to a 20nm hole, [assuming they meant nm not mm per my other comment], how on earth do you make that jump?? That seems huge.
I could do that with my .45acp at 10yards