Here's what I do:
1) separate technical meetings from process/operations meetings and clearly spell out the difference
2) Write in a narrative format what it is you're trying to accomplish and distribute this ahead of time. Doesn't have to be the often lauded "Amazon 6-pager", but if you can't explain what it is you're trying to accomplish in words you need to think about it a little more.
3) do not be afraid to throw someone else's name down as the owner for a specific action (but make sure to follow up if they aren't/can't be present)
4) Designate primary and alternate owners for actions, and make it clear when you need the primary and when the alternate will suffice. This helps with a) meeting fatigue and b) the increase in volume of meetings caused by no more water cooler talk.
5) do not take critical feedback about meeting structure personally. This one was hard for me at first, since I'm used to more formal structures, but there is no "pure best practice" for meetings - especially in a WFH environment. It's an iterative process.