chip production is not simply buying off the shelf equipment and magically you can get to 10nm max yield that is profitable.
equipment is one part of the whole production process. ASML may know how to build EUV but their skillset is not running the fab. if all you need is equipment, why Intel is struggling with 10nm for so long?
Unlike the green initiatives funding (try and get that as a startup hah), money going straight to multibillion euro companies might not be a bad thing in this case.
It's a shame really that most manufacturing of western (EU, US, most ex-soviet states) has been moved to the asian markets. Bert Hubert did a good article about this and the telecom industry a while ago[0].
We see this behaviour all throughout the western world, where we shift money around "creating value" without actually producing anything of note.