I have no digits, but it seems that at least bruteforcing the volumes is in ways with how much chips Apple + AMD + Qualcomm ship.

EUV productivity is a big problem. Currently machines are stopped every few shifts for cleaning tin from mirrors. Even without that, light sources never managed to live to the original power output promise.

There are few known ways to produce EUV light besides tin plasma.

One is in using some plasmonic quantum processes, I can't even fathom how to describe, to produce microwatts of EUV. The other is a free electron laser to produce potentially kilowatts of it non-stop.

The later approach requires to build the whole fab around a synchrotron, a commitment currently nobody can take even with current surreal capex numbers.