Props to Trent and all, but Kraftwerk was doing all this and more in the 1970s. They're the original Mensch-Maschine.
See also: http://www.gearslutz.com/board/attachments/electronic-music-...
Kraftwerk and Nine Inch Nails are two very different entities, most notably when you compare their live performances. Nine Inch Nails would not likely sound like what we know NIN to sound like had not Kraftwerk done their thing in the 70s, but you'd have trouble convincing me that anything on 1994's The Downward Spiral sounds like rehashed 70s music (Crystal Japan not withstanding).