Next TMSC foundry is x1.7 transistors from current process (the 'obsolete' process of the foundries intel is currently building in the USA). Samsung will probably follow, if not done already.
EUV core tools of state of the art foundries are ASML (Netherland with bits from Germany). One of this tool was 100 millions last time I did check the price. Hence 1 billion is too small to be relevant in the foundry business, for large scale mass production.