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"At 9nm, IBM’s transistor is also smaller than the physical limit of silicon transistors, which is around 11nm."

Can anyone cite a source for that statement regarding the theoretical minimum size of silicon transistors?

According to the Wikipedia article about the 11nm node, the thickness of the gate dielectric becomes just 1 atom at that scale: http://en.wikipedia.org/wiki/11_nm

Although Intel mentioned recently that they think they can make it to 8nm

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