From ASML's perspective they didn't have any choice. The US State Dept made the Dutch government do it. Rutte made a show of putting up a fight against the USA, but caved in about a week. Worst yet, the final deal was secret. We'll never know what deal was worked out for the Dutch politicians in the USA's pocket.
As a Dutch citizen it's scary to watch our government and the rest of the EU go against it's own best interests. We are vassals of the USA and it would appear our elites are completely captured.