Ackshually, EUV was cracked by Sandia Labs research in the US, with EUV light sources built by Cymer in the US. ASML was the only one allowed to license the tech and integrate it into their steppers after they bough Cymer in 2013. Hence why US has veto rights to whom Dutch based ASML can sell their EUV steppers to, as in not to China, despite ow much ASML shareholders would like that extra Chinese money.