As far as we know.
Related, there was a pretty interesting backdoor-by-bug attempt on the Linux kernel (at least, one that we know of) back in 2003: https://lwn.net/Articles/57135/
The Linux "bug" was unsophisticated by modern standards, but you could imagine a modern equivalent that's harder to spot:
Make the "bug" happen across several lines of code, especially if some of those lines are part of existing code (so don't appear in the patch being reviewed). Ensure the compiler doesn't warn about it. Make the set of triggering events very unlikely unless you know the attack. It would be very surprising to me if three letter agencies hadn't done or attempted this.