For those like me who don't know these acronyms:

DUV = Deep Ultraviolet

EUV = Extreme Ultraviolet

And they are different methods of lithography.

To quote a random site that I googled while looking for the acronyms:

>Think of EUV as a precision scalpel, capable of carving out the finest details, while DUV is more like a skilled artist's brush – versatile and reliable, but with limitations when it comes to the tiniest features.