It's always been economics. EUV already works. E-beam lithography already works. Carbon nanotube transistors already work. III-V transistors already work. It's just that none of these technologies work as cheaply as double patterned silicon.
Also, there's still huge amount of value to unlock from software, interfaces and the rest.Just look at the iphone where most of the value comes from a great touch interface and an app store. Moore's law is just a bonus.
There are companies like IBM that take a more holistic approach to R&D. I'd expect someone like them to prevail in adaptation of new techniques or even paradigm shift.