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Is there really an imaging technology that is high enough resolution to capture the detail of a modern CPU?

And if so, would that be sufficient for an audit? Aren't CPUs dependent not just on the layout of circuits but also on the material properties of the components, which might not be apparent just from images?

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This is true, imaging a die can help but it's not enough for full assurance. See e.g. this work on inserting hardware trojans through changing the dopant levels on transistors http://sharps.org/wp-content/uploads/BECKER-CHES.pdf

Worse, there isn't currently any nondestructive chip imaging technology!

That just increases the verification costs: order ten chips, verify five randomly chosen ones. If all five are clean, the other five are probably also clean. Modify numbers for the desired cost/risk trade-off.

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