Suppose I have a million dollars. Could I make a fab [1] that can manufacture a Intel 286 processor (with feature size roughly 1.5 micrometer) or equivalent? If not, what year of semiconductor manufacturing technology could I replicate?

Wikipedia provides this rough estimate of feature size - year table: 10 µm – 1971 6 µm – 1974 3 µm – 1977 1.5 µm – 1982 1 µm – 1985 800 nm – 1989 600 nm – 1994 350 nm – 1995

What about only a 100K USD?

[1] capital costs only. Not labor.