Besides Intel (who doesnt need a subsidy IMHO) who even makes chips on advanced nodes in the US any more?
The better question: who is building a next Fab. Samsung will expand Intel could TSMC will
Someone, somewhere, will restart Sematech as a research facility. I would bet on either Austin or Ann Arbor.
Where you have deep voodoo are some of the MEMS and analog manufacturing processes (e.g. ADI). Those aren't necessarily small feature sizes, but they are hyper-advanced. It take massive R&D to replicate them. But they're not large volume either. A few years back, I think car airbags might have been the biggest application.