Criminal liability is inappropriate for people spreading disease unless you can really prove intent. And, frankly, trying to prosecute 200k people is infeasible.
Civil liability? Taking away federal funding to sheriffs who refuse to enforce mask rules?
Well then, let’s start with the people spreading misinformation, and holding them responsible for it by removing their Facebook groups.
Do you really believe every person has functional critical thinking capacity and won't be convinced by dangerous lies?