In what way does Intel offer more than a proportionate (large) number of small companies?

Note, I'm not claiming it is unfair - small and crafty companies often get benefits as well - mostly the middle size and honest ones gets shafted.

I would rather have TSMC open a chip plant in Europe if it's a big company, they are far superior, and already the biggest customer of ASML.

Yes. They can offer not to pay taxes in europe like other american companies.