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The ASML are the star of the show, and they are divas.

They demand staggering amount of power, purest water, liquid H, liquid He.

And if one of those are missing, they will refuse to work. So you better have backup.

In the end, the cost of the ASML machine won't be that high.

Do you know any numbers for the staggering amounts? And what size these machines are?

Enough to draw attention of environmental protection regulators: https://wccftech.com/tsmcs-second-2nm-plant-sparks-environme...

Edit: apparently, TSMC alone is responsible for nearly 5% of the entire energy consumption of Taiwan. Holy. https://english.cw.com.tw/article/article.action?id=2766

I remember seeing those figures on some video from AMSL about EUV machine. They also mention about how many planes are needed to transport those machines. But I don't remember the values.

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