The ASML EUV machines are extremely complicated and rate limited by the polishing of the Zeiss mirrors which require 9 months to manufacture. Zeiss is in the process of scaling up, but in the meantime the EUV machines are very much backordered and that supply limitation is partially responsible for the slowdown in the release of updated nodes. There is an update of the ASML machines which are far more complicated that cost twice as much and should be part of a fab line in production in 2025.