One somewhat useful figure you’ll see used is MTr/mm^2 or mega-transistor per square millimeter. That number can change depending on what exactly those transistors are being used for (which cell libraries are used).
IIRC Intel proposed a standard ratio for such measurements a while back.
Density doesn’t make a process better for everything however.
For memory: space, speed, power required, longevity (against time, against temperature / ambient energy).
Computation usually requires some tiny bits of very volatile memory (registers, cache, invisible buffers, etc), but similarly must have tradeoffs for space, speed, power, and longevity.
Radiation Hardened / hostile environment design libraries can also be useful for automotive, heavy industry, military, and space hardened applications. I'm not sure of the details but guess they'd frequently use more space, power, and possibly even active shielding (E.G. additional layers of conductors and/or capacitors sandwiching the logic bits to try to protect them and stabilize local currents).
(At least for FPGA-based satellites. I'm sure there are many varied approaches at play these days.)
Problem was that people had certain expectation that a "45nm" process could fit more transistors than "90nm" one. Would be kind of awkward to name it like "22nm++++" and you have no idea roughly how much better it was than the old planar "22nm" process.
That seems to have changed in the last couple years, though. AMD and Apple seem to have gotten serious.
(I know, Moore's law is about transistor count, and I guess adding more cores technically increases the transistor count. But as a software engineer, I need my chips to get 2x faster every 18 months, or I'll have to start using a profiler or something!)