Hmm. In a CMOS structure with a weakly turned off device, you'd need the effective off resistance to be more than 1/20th of the effective on for the logic value to degrade by roughly 5%. Did we have such leaky transistors for 130nm/90nm when the shift happened?

A quick calculation I did with a 90nm model for I have some parameters with vt=0.3, vdd=1.2, subthreshold slope=90mV/decade and dibl coeff=0.1 seems to suggest that leakage would still be < 1/100th of the on current.