That is a development system. The purchase prices of the actual manufacturing systems are never disclosed, since the negotiated price differs between customers.

In any event the HVM systems will cost significantly less. This similar article says $150M, as I claimed, and again the actual customer price would be less:

https://content.techgig.com/technology/intel-to-get-chipmaki...

> ASML's most advanced machines in current commercial production, known as EUV lithography systems because of the "Extreme Ultraviolet" light waves they use to map out the circuitry of computer chips, are as big as a bus and cost around $150 million each.