Most of it probably isn't even on paper but in the minds of their top employees.
Note that TSMC depends on other companies for various parts. Without those they need even more money and time to duplicate it all. There is nothing they are doing that you can't hire engineers to duplicate. They figured it out, so anyone could. However it isn't easy, we could be talking about hundreds of billions of dollars.
TSMC does not have secrets that put them ahead. It’s all about the culture of operations efficiency and just being first to invest in actually implementing cutting edge tech.
ASML is the only company that sells certain equipment needed for photolithography. These machines are physically large and sell for hundreds of millions of dollars. Their export is regulated by multiple governments and international treaties. There are intelligence agencies tracking every single one of those machines and ensuring they don't fall into the wrong hands.
This is just one fatal flaw with the plan.
What, not even ASML that literally sells them that tech?:) No need to over dramatize.