there was the play R.U.R by Karel Čapek. The play is from 1921, and it coined the word 'Robot'.

See https://en.wikipedia.org/wiki/R.U.R.

Now in the plot "the robots revolt and cause the extinction of the human race".

Also there is his older brother, the Golem. He has his own movie from 1915.

See https://en.wikipedia.org/wiki/The_Golem_(1915_film)