It's all in ASML's 3Q IR presentation, "Net system sales breakdown (Quarterly)"- Q3'23 Net system sales €5,308 million,

Sales in lithography units:

  11 EUV, 32 Arfi, 9 ArFdry, 44 KrF, 16 i-Line.

China has no access to EUV; no sales breakdown by model.