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They cannot, ASML tech is licensed from a US government (DOE) owned company - EUV LLC under full congressional oversight. The EUV light source is made in the US because they had to buy a US company for that too.

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How does controlling one component give them control over the whole machine?

It happens to be a very important component, that's how.

With that argument, Germany also has "full control" over those machines, as the optics are a "very important component" manufactured by Zeiss.

The German government could probably dictate export terms too then. What's your point, that this is unfair or something?

Um yes?

Their entire EUV process is based on US research and patents. Their largest R&D center is now in the US.

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