The current technology to generate extreme ultraviolet involves a container of molten/liquid tin that is released drop by drop; these are vaporized by a laser. The equipment for this is sold by one vendor, ASML (a company in the Netherlands). It is extremely expensive.
https://en.m.wikipedia.org/wiki/Extreme_ultraviolet_lithogra...
A Japanese advance was reported on HN recently that could simplify EUV.