Einstein for sure. For the rest: I'm not sure that they're clearly ahead of Feynman. I'm not sure they're behind, either. To me, they seem to kind of be in a cluster.
Apart from Einstein, Heisenberg, Dirac, Pauli, Bohr and Fermi are clearly ahead in depth and breadth of contribution. Post-war it's less clear, but IMO Steven Weinberg and Murray Gell Mann are probably greater.