Don’t conflate “effective feature size” (the 5nm used in this article) with “real” feature size (or, more importantly, pitch), with transistor size. Transistors are still huge compared to atoms—think hundreds of thousands, or millions. The issues at this scale are all electrical. (Bullshit terms like “quantum tunneling” are bandied about; the scientific use isn’t wrong, but any journalist using the term probably is.)
There’s alot of room down there, below the extended Moore’s law, just not always so CMOS-ey.