You can see this if you compare 2 processes: Intel 45nm had 2,779,468 transistors/mm², and the Apple A14 (7nm) had a transistor density of 134,100,000 t/mm²
2,779,468*(45/7)²=114,865,769, so the two are quite close.
https://en.wikipedia.org/wiki/Transistor_count#Microprocesso...
As it became harder to shrink the minimum feature size, they figured out other ways to shrink. For example various ways of stacking things on top of each other rather than having them side by side[1].
As such they could cram more transistors in the same area compared to a planar transistor, and hence you got the same effect as shrinking the minumum feature size.
Not sure exactly how they name things, but one could calculate what feature size would have been required to get a given transistor density using a plain planar transistor, for comparison.
[1]: https://semiengineering.com/from-finfets-to-gate-all-around/
But then they started having to cheat: you can take a big transistor and "fold" it vertically to be smaller but still have the same gate area, etc... The actual feature sizes may not have changed much but you have the 2x density increase, so you name your new node "32nm" even though the actual width of the gate feature when seen from above didn't change, etc...
But then somewhere around 10nm everyone just gave up and started handing out random numbers. TSMC's 3nm process is not remotely a 2x density increase over 5nm, for example.
There's also a distinction between "drawn length" which is the number specified by the designer, and the actual feature size on silicon. This can be scaled up or down either completely arbitrarily (meaning the drawn length is a total sham) or optically (meaning the drawn length is real but the chip is fabricated with a magnification <1)
Obviously there's a ton of complexity here and lots of cheats and optimizations were done over the decades that weren't directly related to linear sizing. But I stand behind the threshold I gave: the big discontinuity in the industry, where "node size" and "feature size" clearly began to significantly diverge, was the introduction of finfet/tri-gate transistors in Intel 32nm.
The "divergence" started happening long before finfets where Intel is concerned, but they weren't manufacturing for anyone else. For the rest of the foundries, it still followed somewhat logically, if not exactly, down to 14 at least.
Hahaha
So you get 65, 40, 28, 20, 14, 10, 7, 5, 3, 2, 1 ...